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Workshop on Surface Science Related to EUV Optics Contamination
06/02/2009, NIST

Speakers

Last update: May 28, 2009
Name Institution Email
Robert Bartynski Rutgers University bart@physics.rutgers.edu
Gil Delgado KLA Tencor Gil.Delgado@kla-tencor.com
Greg Denbeaux CNSE, SUNY Albany GDenbeaux@uamail.albany.edu
Howard Fairbrother Johns Hopkins University howardf@jhu.edu
Bill Gadzuk NIST gadzuk@nist.gov
Noreen Harned ASML Noreen.Harned@asml.com
Shannon Hill NIST shill@nist.gov
Vibhu Jindal Sematech Vibhu.Jindal@SEMATECH.Org
Karl Johnson University of Pittsburgh karlj@pitt.edu, astarke@pitt.edu
Uzo Okoroanyanwu Global Foundries Uzo.Oko@globalfoundries.com
Andras Vladar NIST andras.vladar@nist.gov
Chundao Wang Tulane University ericenkin@gmail.com
Andrea Wuest Sematech Andrea.Wuest@SEMATECH.Org
John Yates University of Virginia johnt@virginia.edu

Participants

Name Institution Email
Nadir S. Faradzhev NIST / Rutgers University nadirf@nist.gov
Rashi Garg NIST / CNSE, SUNY Albany rashi.garg@nist.gov
Thomas B. Lucatorto NIST thomas.lucatorto@nist.gov
Cedric Powell NIST cpowell@nist.gov
Sylvie Rangan Rutgers University rangan@physics.rutgers.edu
Lee Richter NIST lee.richter@nist.gov
Ping-Shine Shaw NIST Ping-shine.shaw@nist.gov
Charlie Tarrio NIST Charles.Tarrio@nist.gov
Dan Wack KLA Tencor Dan.Wack@kla-tencor.com
I-Fan Wu KLA Tencor
Boris Yakshinskiy Rutgers University yaksh@physics.rutgers.edu
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