Presentations
Boris Yakshinskiy, Shimon Zalkind, Nejib Hedhili, Theodore Madey and Robert Bartynski
Rutgers, The State University of New Jersey
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The Adsorption of hydrocarbons on model multilayer mirror surfaces: TiO2(011), Ru(1010) and Al2O3 films |
Greg Denbeaux, Petros Thomas, Yu-Jen Fan, Alin Antohe, Leonid Yankulin, Rashi Garg
CNSE, University at Albany
Andrea Wüest, Vibhu Jindal
SEMATECH |
The influence of out of band radiation on EUV optics contamination |
Shannon Hill, Nadir Faradzhev, Charles Tarrio and Thomas Lucatorto
National Institute of Standards & Technology (NIST)
R. A. Bartynski, B. V. Yakshinskiy, T. E. Madey
Rutgers, the State University of New Jersey |
Measuring the EUV-induced contamination rates of
TiO2-capped multilayer optics by anticipated
production-environment organics |
Howard Fairbrother
Johns Hopkins University |
Carbon abatement of EBID Deposits |
Vibhu Jindal, Andrea Wüest
SEMATECH |
Modeling of EUV optics carbon
contamination: Issues and Approaches |
J. Karl Johnson
University of Pittsburgh |
Fundamentals of Molecular Modeling of Adsorption |
Uzo Okoroanyanwu, Kornelia Dittmar, Torsten Fahr,
Tom Wallow, Bruno La Fontaine, Obert Wood
Global Foundries |
Analysis of Contaminated EUV Masks |
András E. Vladár, Kavuri P. Purushotham
and Michael T. Postek
National Institute of Standards & Technology (NIST) |
Electron Beam-Induced Contamination
in the Scanning Electron Microscope:
a Thing of the Past |
Chuandao Wang, Shao-chun Li, Michael Johnson,
Ulrike Diebold
Tulane University |
Carbon removal from EUV mirror cap layers:
model studies |
Andrea Wüest
SEMATECH |
Overview of EUV Lithography and EUV Optics Contamination |
John T. Yates, Jr.
University of Virginia |
Photochemistry on Surfaces - Applications to EUV Mirror Cleanup |
 Presentations are in Portable Document Format (PDF). Please get Adobe Reader here if necessary.
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This information is made available through NIST facilities.
However, the views expressed and the decisions reported do not necessarily
connote NIST agreement with, or endorsement of them. Further, NIST does not
endorse any commercial products that may be mentioned.
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