Copyright 1996 American Institute of Physics.
This article may be downloaded for personal use only.
Any other use requires prior permission of the author and the American Institute of Physics.

The following article appeared in Journal of Applied Physics 79 (1) 93-98 and may be found at  AIP Journals
 
 

Click the link below to download a PDF version of this paper: (134 KB)

"Evidence for inelastic processes for N3+ and N4+ from ion energy distributions in He/N2 rf glow discharges," H. H. Hwang, J. K. Olthoff, R. J. Van Brunt, S. B. Radovanov, and M. J. Kushner, J. Appl. Phys. 79(1), 93-98 (1996).