Technical Activities

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"Technical Activities 2001" - Table of Contents Division home page

Optical Technology Division

Division Overview  |  Program Directions   |   Major Technical Highlights

Major Technical Highlights

  • Validated Heat-Flux Sensor Responsivities Using a Spherical Blackbody. The Division has been researching new methods to accurately determine the radiative responsivities of heat-flux sensors, widely used in fire and aerodynamic tests of aerospace vehicles and components.

    Figure 1

    Figure 1. Spherical blackbody furnace used for the radiative calibration of heat-flux sensor responsivities to an expanded uncertainty of 2 % (k = 2).

      Comparison of radiative heat-flux measurements between various laboratories using a variety of different techniques reveal that presently claimed responsivities vary by as much as 15 %. Studies at NIST indicate, however, that the sensor responsivities are stable and reproducible to better than 1 % over a period of several years. The calibration method developed by the Division uses an electrical substitution radiometer to determine the absolute heat flux at the sensor from a cylindrical heat-pipe blackbody (detector-based method) and has an expanded uncertainty of 2 % (k = 2). To validate this detector-based method, the Division has developed a totally independent source-based calibration procedure in which a sensor is plunged into a 0.23 m diameter high-temperature spherical blackbody, as shown in fig. 1, and the heat flux is directly calculated using the Stefan-Boltzmann equation. This approach also yields a responsivity with an expanded uncertainty of 2 % (k = 2). Sensors calibrated using the two approaches give responsivities that agree to within 2 % (k = 2), validating the two methods. The availability of accurate heat-flux sensor calibrations from NIST allows sensor users and manufacturers to better assess the performance of their calibration methods and offers validated calibration procedures for implementation by other laboratories. (B. Tsai, D. DeWitt, and M. Annageri)

  • A New Millimeter-to-THz Spectroscopy Tool for Plasma-Etching Chemical Diagnostics. With support from ATP Intramural funding and building on expertise developed through a Competence program in Advanced Terahertz (THz) Metrology, the Optical Technology and Atomic Physics Divisions have collaborated on the development of a new spectroscopic technique for the characterization of the complex chemistry that occurs in a semiconductor plasma-etching reactor. The understanding and the control of this chemistry is critical to the microelectronics industry as it moves toward more complex multistep etching processes, larger wafers, and smaller and higher-aspect-ratio features. The new technique uses millimeter-to-THz linear-absorption spectroscopy with backward-wave oscillator (BWO) coherent radiation sources to determine the density and temperature of plasma species, such as radicals, ions, and molecules, along the radiation propagation path.

    Figure 2

    Figure 2. Second-derivative submillimeter spectra of an absorption line of CF2 in a 250 W inductively coupled CF3H plasma in a Gaseous Electronics Conference (GEC) reference cell at a constant cell pressure of 1.3 Pa and various flow rates of CF3H. The spectra demonstrate that the production of CF2 is increased at high flow rates.

      The technique is a significant improvement over previous methods as it provides simple and unambiguous molecular identification and quantification of a broad range of molecular species. Initial tests (see fig. 2) using a standard test reactor demonstrated the detection of CF3H, CF2, CF, CO, and CF2O in a low-pressure, inductively coupled, CF3H plasma, as might be used, for instance, in the etching of SiO2 on Si wafers. Decomposition of the CF3H in the plasma is found to be nearly complete at 90 %. The production of CO and CF2O is attributed to etching of a quartz (SiO2) dielectric shielding plate by the CF3H decomposition products or to reactions of these products with water-vapor impurities in the reactor feed gas. The latter possibility is presently being addressed by directly examining submillimeter absorption lines of water vapor in the reactor. Independent translational, rotational, and vibrational temperature measurements are also possible with the technique, furnishing additional valuable input data to plasma models. Efforts are being made to extend the measurement frequency to above 1 THz using solid-state photomixers to allow the direct measurements of the HF concentration, an important component of hydrogen-rich, hydrofluorocarbon-based, etching plasmas. (E. Benck, G. Golubiatnikov, D. Plusquellic, and G. Fraser)

  • Radiometric Calibration of the NIST Advanced Radiometer (NISTAR) and Earth Polychromatic Imaging Camera (EPIC) for the TRIANA Satellite. OTD has completed the radiometric calibration of two instruments, NISTAR (NIST Advanced Radiometer) and EPIC (Earth Polychromatic Imaging Camera), both planned for deployment on the Triana satellite. The Triana satellite, after launch by the Space Shuttle, is to be positioned in an orbit at the Lagrange-1 point to allow continuous monitoring of the sunlit Earth. NISTAR will measure the absolute irradiance of the Earth while EPIC will provide hourly, spatially resolved measurements of cloud properties, ozone concentration, and aerosol levels of the Earth's atmosphere.

    NISTAR, originally designed by NIST, was calibrated at NIST using the capabilities of the Division's Spectral Irradiance and Radiance Calibrations with Uniform Sources (SIRCUS) facility. During the tests, NISTAR was illuminated to mimic its view of the Earth from space. The resulting relative uncertainties on the calibration are below 1 %. The NISTAR instrument has since been delivered to NASA's Goddard Space Flight Center and integrated onto the Triana satellite.

    The bulk of the EPIC radiometric calibration was performed during thermal and vacuum testing of the instrument at Lockheed Martin in Palo Alto, California in December 2000, with additional, final measurements performed in October 2001 at the Goddard Space Flight Center. The intense, multi-day calibration effort required the unique radiometric expertise of NIST staff, specialized calibration sources and detectors, on-site evaluation of results, and modifications to the initial calibration plan when circumstances or scheduling changed. Preliminary results have already been made available to the mission science team. (T. Early, D. Allen, C. Johnson, J. Rice, S. Lorentz, S. Brown, and K. Lykke)

  • THz Spectra of Biomolecules. As part of a Competence program in Advanced Terahertz Metrology, the Division has developed a novel THz spectrometer for the investigation of large-amplitude vibrational motions in biomolecules, important for their flexibility. The capabilities of the instrument have been demonstrated by recording THz spectra of two small biological molecules, biotin and riboflavin, and the protein myoglobin.

    THz radiation is produced by difference frequency mixing of two near-infrared laser beams, separated in frequency from 0.1 THz to 4 THz, in a solid-state GaAs photomixer. The THz radiation is directed through the sample and detected by a liquid-He-cooled bolometer. To increase sensitivity and reduce spectral artifact absorptions, the intense atmospheric water-vapor absorption present at THz frequencies and the etalon or standing-wave structure characteristic of this spectral region, were effectively eliminated by placing the photomixer, liquid-He-cooled sample, and bolometer in a common vacuum system, with no windows separating the components.

    Spectra were recorded with the samples cooled to 4.2 K to reduce inhomogeneous broadening for increased spectral resolution. The spectra of biotin and riboflavin reveal a number of low-frequency vibrations at frequencies less than 4 THz with linewidths of approximately 0.03 THz. Complementary measurements using Raman spectroscopy have also been performed, providing additional information on the low frequency vibrations. Efforts are presently underway to identify these motions with specific nuclear displacements.

    In contrast to biotin and riboflavin, the THz spectra of myoglobin is broad and structureless Additionally, the transmission significantly increases with temperature. Previous studies of proteins in this spectral region revealed significant spectral structure, attributed to standing-wave patterns, which are effectively removed in our study. Our myoglobin observations challenge the basis for the application of THz spectroscopy to biological warfare agent detection, that is, that biological agents will have structured THz spectra that will aid their detection and identification. (T. Korter, D. Plusquellic, A. Hight Walker, E. Heilweil, and G. Fraser)

  • Radiometric Calibration of the Marine Optical Buoy (MOBY). The Division is providing radiometric calibration of the Marine Optical Buoy (MOBY) to ensure the accuracy of the measured down-welling irradiances and ocean-leaving radiances used to calibrate or validate ocean-color measurement satellite instruments, such as the Sea-Viewing Wide Field-of-View Sensor (SeaWifs) and the Moderate Resolution Imaging Spectroradiometer (MODIS). The Division is supporting the radiometric calibration of MOBY by both traveling to the deployment site in Hawaii to perform calibrations of the buoy and by developing standards and methodologies to directly calibrate and test a duplicate MOBY spectrograph at NIST. This spectrograph, denoted MOS for Marine Optical System, was characterized at NIST using SIRCUS, in response to concerns about stray or scattered light causing significant errors in the instrument readings, particularly at shorter wavelengths (see fig. 3). The success of the SIRCUS measurements led to the development of a "Traveling" SIRCUS to allow direct calibration of the MOBY instrument in Hawaii using the Division's laser-based monochromatic radiance sources. The improved calibration of MOBY is allowing the correction of the legacy ocean radiance and irradiance data, which is being made available to researchers dependent on these measurements. The project has also demonstrated the unique advantages of using SIRCUS for the calibration of remote sensing instruments. (C. Johnson, S. Brown, and K. Lykke)
  Figure 3

Figure 3. This plot is the normalized instrument responsivity versus wavelength for the Marine Optical Spectrograph (MOS) as measured using a broadband radiation source and a monochromatic source furnished by the laser-based SIRCUS calibration facility.

  • Traveling SIRCUS. The Division is actively involved in providing radiometric calibration for remote sensing satellites. It is often desirable to be able to perform the calibrations at the customer's site, typically an aerospace company or a NASA or DoD facility, either because of the instruments large size or fragility, scheduling constraints, or special clean-room or environmental limitations. To be able to provide the highest accuracy spectroradiometric calibrations requires that we bring the capabilities of SIRCUS, i.e., broadly tunable single-frequency radiance and irradiance standards, to these sites. We are presently developing such capabilities in the visible and near infrared, which we are calling Traveling SIRCUS. Upon completion, Traveling SIRCUS will consist of Ti:Sapphire and dye lasers pumped by a solid-state diode-pumped laser, a small Ar-ion laser, a solid-state frequency doubler, and integrating spheres, providing a monochromatic source of continuous spectral radiance from the ultraviolet to the near-infrared, that is, from 350 nm to 980 nm. While at NIST, the system is used as a research tool to advance the capabilities of SIRCUS, as the present SIRCUS instruments are frequently unavailable due to the calibration workload. The initial deployment of Traveling SIRCUS was made recently at the MOBY site in Hawaii (see above). (C. Johnson, and S. Brown, K. Lykke)

  • Calibration of Light-Pipe Radiation Thermometers for Applications in Rapid Thermal Processing (RTP). To help improve temperature measurements in semiconductor RTP, the Division has undertaken extensive research on light-pipe radiation thermometers (LPRT's) and their calibration. The goal of the RTP program is to enable the semiconductor industry to achieve temperature measurements of better than 2 °C at 1000 °C, a goal stated in the Semiconductor Industry Association roadmap. Improved LPRT measurements are essential to achieving this goal, as they are the predominant temperature measurement instruments in RTP. The Division's research has led to a calibration protocol and a set of recommendations to ensure accurate temperature measurements with LPRT's.
    Figure 4

    Figure 4. This figure shows the calibration of a light-pipe radiation thermometer (LPRT) using a sodium heat-pipe blackbody for temperatures between 700 °C and 950 °C. TC refers to thermocouple.

    Expanded uncertainties of 0.6 °C (k = 2) were achieved for the calibration of LPRT's for radiance temperature near 1000 °C. The radiance temperature standard was a well-characterized, high-emissivity, sodium-heat-pipe blackbody, as shown in fig. 4. To be useful in applications, LPRT's must retain their calibration over a long period of time to limit the down time of the RTP chamber. Short-term, 10 min variations in the sensor response were found to be less than 0.1 °C, while long-term, 1 yr variations in the sensor response were less than 1 °C. These measurements indicate that LPRT's are capable of making temperature measurements to within 1 °C. (C. Gibson, F. Lovas, and B. Tsai,)

  • Intrinsic Birefringence in CaF2. Deep ultraviolet photolithography technology has turned to crystalline CaF2 for the next generation of refractive optical elements because of the poor transmission of glasses at 193 nm and 157 nm. Despite the cubic symmetry of CaF2, its crystalline nature introduces spatial-dispersion-induced birefringence, which results from the finite wave vector of the light. Measurements made in this Division and the Atomic Physics Division were supported with theoretical calculations performed in collaboration with the Electron and Optical Physics Division. We have successfully modeled it in CaF2, BaF2, and several semiconductor materials from first principles, obtaining good agreement with all measurements.

    Our main results are presented in fig. 5. Our key findings are as follows. First, the birefringence in CaF2 is about ten times larger than specifications desired by the semiconductor industry. Second, the birefringence in CaF2 is opposite in sign from that in BaF2 and many other materials. Third, a mixed CaxBa1-xF2 crystal may exhibit zero birefringence at chosen wavelengths by tuning x. (E.L. Shirley)

  Figure 5

Figure 5. Index difference for two polarizations for light propagation along the [110] direction.

  • High-level UV Irradiance Calibration. We have calibrated the irradiance responsivity of a diode array spectrophotometer designed to measure the irradiance at the exit port of an advanced xenon-lamp-illuminated integrating sphere source (BFRL). The 2 m diameter-integrating sphere was designed for accelerated UV aging studies of advanced materials over the spectral range from 290 nm to 400 nm, with irradiance levels at the sphere exit port calculated to be as high as the equivalent irradiance from 30 suns. A fiber-coupled diode array spectrophotometer, equipped with an integrating sphere fore optic, is used to calculate the irradiance at an exit port.

    We used a collimated laser source to determine the spectral power responsivity of the spectrophotometer as several wavelengths over the 300 nm to 400 nm spectral region. We then determined the effective aperture area of the input fore optic, and averaged the response over the entrance aperture, to establish the irradiance responsivity. To obtain an estimate of the responsivity over the entire spectral range from 300 nm to 400 nm, we measured the output of a Xe arc lamp using a reference standard filter radiometer, and interpolated the radiance between filter radiometer tie points. This relative measurement was subsequently scaled at 334 nm to obtain a measure of the absolute spectral responsivity of the spectrophotometer. (S. Brown and E. Bryd, with J. Chin, Div. 862)

  • Improved Low Background Infrared Facility (LBIR) Broadband Blackbody Calibrations. The LBIR broadband blackbody calibrations can now be performed at 1 nW power levels with 1 % Type A (random contributions) uncertainty. This achievement is a direct consequence of improvements in background environment stability and the use of the new LBIR Absolute Cryogenic Radiometer (ACRii), and corresponds to a factor of 10 improvement in power measurement capability. A new refrigerator system with greater cooling capacity and better temperature stability is partially responsible for the improved background environment. The calibrations are also now being performed in the newer Spectral Calibration Chamber (SCC) with its more efficient cryoshrouds. These improvements have changed the background environment from 25 K with a relatively common 0.1 K drift in temperature in a 10 minute period, to a 17 K environment with drifts in temperature of less that 0.01 K over a 10 minute period. The electronics-limited 10 pW sensitivity of the ACRii can be fully used in the new stable environment. This can be compared to the use of the older ACR in the Broadband Calibration Chamber (BCC) where the noise floor was 100 pW at best. Figure 6 shows an example of a 97 pW power measurement using the ACRii in the SCC with the new refrigerator. These improvements have made it possible to meet most of the recent calibration requirements for the blackbody sources from the aerospace contractors of the Ballistic Missile Defense Organization (BMDO). (A. Carter and S. Lorentz)
  Figure 6

Figure 6. The plot shows 97 pW power measurements made using the LBIR's new Absolute Cryogenic Radiometer (ACRii) in the new Spectral Calibration Chamber. (1) ACRii heater power without incident optical radiation. (2) ACRii heater power with incident optical radiation.

  • NIST-NPL CCPR Intercomparison of Mid-infrared Transmittance and Reflectance Scales Shows Good Agreement. For the first time, an international intercomparison of infrared spectrophotometry scales at the National Measurement Institute (NMI) level has been performed. NIST and the National Physical Laboratory (NPL) of the UK have undertaken a comparison of scales for regular transmittance and reflectance in the mid-infrared part of the spectrum. The comparisons have been carried out as "Supplementary Comparisons" of the Consultative Committee for Photometry and Radiometry (CCPR) of the Bureau International des Poids et Mesures (BIPM). The transmittance comparison was performed using a Schott NG11 glass as the comparison artifact. Measurements were carried out at seven wavelengths between 2.5 µm and 5 µm where the gradient of the transmittance profile was flat. The reflectance comparison was performed using three different artifacts – a non-overcoated front-aluminized glass mirror, a NiCr coating on a glass substrate, and an uncoated plate of Schott BK7 optical glass – to cover a range of reflectance values. Measurements were carried out for near-normal incidence between 2.5 µm and 18 µm.

    The diffuse gold integrating sphere used to perform the NIST measurements is shown in fig. 7. In all cases there was agreement between the two national labs, within the combined expanded uncertainties. (L. Hanssen and S. Kaplan)

  Figure 7

Figure 7. Photograph of the NIST integrating sphere for absolute infrared spectral transmittance and reflectance.

  • Development of Monte-Carlo Integrating Sphere Reflectometer Model. The Division has developed a highly efficient code based on Monte Carlo methods and ray-tracing to study the performance of an integrating sphere designed for hemispherical-directional reflectance measurement. This code has been used to perform a comparative analysis of different sphere designs, with variation of critical sphere parameters including sphere wall reflectance and sample scattering characteristics. Integrating spheres have been used for nearly a century for reflectance measurements. However, due to the inherent difficulties of accurate uniform collection of all reflected or transmitted light from a diffuse sample, significant measurement errors and uncertainties are common. A significant contributor is the complexity of analytical approaches to sphere analysis that ultimately necessitates the use of approximations. Numerical modeling approaches do not require approximations, but the long computation times even with the fastest computer processors, limit the accuracy of the results.
  Figure 8

Figure 8. This plot demonstrates the effect of different design options, for integrating spheres, on the accuracy of reflectance measurements.

  Our code incorporates a number of significant time-saving features, that enable us to reduce statistical uncertainties to less than 0.1%, even for very low efficiency spheres. Numerical modeling methods offer the most promise for sphere analysis, design, and error reduction. For example, the effect of different design options including baffling arrangements on the measurement accuracy of the sphere was analyzed with results shown in fig. 8. The studies have resulted in a specific sphere design to be built for near-infrared reflectance and non-contact temperature measurements. (L. Hanssen)

  • LED Sphere. Currently, typical light sources used for radiometric, photometric, and colorimetric calibrations use broad-band, incandescent or Xenon-arc lamps. Most of the radiation from these sources lies in the infrared spectral region, and is consequently not useful for photometric and colorimetric calibrations. Colorimeters and photometers often measure sources (such as displays) with significantly different spectral distributions from the calibration source. The errors in these measurements are often unknown, and can be quite large. For example, colorimeters can be calibrated against an incandescent source with minimal errors of 0.001 or less in x,y chromaticity. However, errors in measurements of displays using these colorimeters can be larger than 0.01 in x,y. Development of a stable, spectrally tunable, radiometric source could positively impact a variety of photometric, colorimetric, and radiometric programs. Recent advances in LED materials and their manufacturing processes have resulted in the commercial availability of LED's with colors spanning the entire visible spectrum. We are exploiting this newly enhanced technology in the design of a tunable spectral distribution integrating sphere source (ISS).

    Figure 9

    Figure 9. Picture of LED sphere showing red (upper left), green (upper right), blue (lower right), and white (center) outputs.

    We have developed a prototype tunable LED-based ISS, shown in fig. 9. The integrating sphere is equipped with 10 different LED's with spectral distributions ranging from the blue to the red. By varying the drive current of the individual LED's, the sphere spectral radiance can be tuned over a broad wavelength range enabling calibrations of colorimeters and spectroradiometers against the ISS with different spectral distributions. (S. Brown and G. Eppeldauer)

  • Detector Damage/Depth Dependence. A new detector measurement capability, illustrated in fig. 10 has been added to the UV radiometric beamline at the Synchrotron Ultraviolet Radiation Facility (SURF III). The beamline is capable of calibrating photodetectors from 130 nm to 600 nm.
    Figure 10

    Figure 10. Schematic of the NIST quantum efficiency measurement setup.

    The new setup allows simultaneous measurement of the spectral reflectivity and the spectral power responsivity of the detector. With the measurement of both quantities, the important detector quantity of internal quantum efficiency, the response of the detector per total amount of the radiation absorbed by the detector, can be deduced. The internal quantum efficiency of a detector depends only on the internal mechanism of converting photons to electrons and the collection of electrons because the variation in radiation loss due to detector surface reflectivity is eliminated during the calculation of internal quantum efficiency. In the visible, the internal quantum efficiency of a working standard silicon photodiode is close to 100 % and was modeled to provide a detector calibration curve by extrapolating to all wavelengths from visible to near infrared. The new setup measures both reflectivity and power responsivity simultaneously to reduce the uncertainty in deriving the internal quantum efficiency caused by effects like positioning of the detector and contamination of the detector surface when measurements are performed separately. We have studied the internal quantum efficiency of a variety of photodetectors, especially UV detectors with potential application for the photolithographic industry. Our measurements of the internal quantum efficiency have provided us with insight into the photon detection mechanism. We were able to model the detector internal quantum efficiency and found clear evidence of interface trap states inside some of the detectors. We also found evidence that these trap states were formed when a detector is damaged by UV radiation. The capability of studying detector internal quantum efficiency has become an important tool for detector characterization. (R. Gupta and P. Shaw)

  • Mutual Recognition Arrangement. A Mutual Recognition Arrangement (MRA) was drawn up by the International Committee of Weights and Measures (CIPM), under the auspices of the Meter Convention. At a meeting held in Paris on 14 October 1999, the directors of the national metrology institutes (NMIs) of 38 Member States of the Meter Convention and representatives of two international organizations signed the MRA.

    This Mutual Recognition Arrangement is a response to a growing need for an open, transparent, and comprehensive scheme to give users reliable quantitative information on the comparability of national metrology services and to provide the technical basis for wider agreements related to international trade, commerce, and regulatory affairs. The eventual outcome of the MRA will be statements of the measurement capabilities of each NMI in a web-accessible database, known as the key comparison and calibration database (KCDB), maintained by the BIPM.

    The OTD has been involved in a number of international intercomparisons including spectral responsivity (from 200 nm to 1600 nm), spectral irradiance, aperture area, luminous intensity and luminous flux, spectral regular transmittance, and diffuse spectral reflectance. These intercomparisons form the underpinning of the MRA verification process and are listed in Appendix C.

    The acceptance of NIST's capabilities for Thermometry and Photometry and Radiometry are anticipated for spring of 2002. Additional information on the MRA and the KCDB can be found at http://kcdb.bipm.org/BIPM-KCDB/ (C. Gibson, T. Early, Y. Ohno, and S. Bruce)

  • Determining the Molecular Basis of Adhesion at Buried Interfaces. Adhesion between dissimilar materials is of critical importance to a variety of industrial products and processes, e.g., coatings, fiber-reinforced composites, multilayer electronic devices, and integrated circuit packaging. Until recently, a technique to adequately characterize buried interfaces, and in particular, to determine the molecular structure at such an interface has been lacking. We have been developing novel state-of-the-art non-linear optical spectroscopies, such as Sum Frequency Generation (SFG), to explore molecular structure at material surfaces and buried interfaces for a variety of applications.

    Figure 11

    Figure 11. Vibrationally resonant SFG spectra illustrating changes in molecular orientation which correlate with atomic oxygen treatment of the substrate.

      We have extended our previous studies of free polymer surfaces [J. Phys. Chem. B 105, 2785 (2001)] to investigate the molecular structure of buried polymer interfaces, specifically, the polystyrene(PS)/spin-on-glass(SOG) interface. Thin films of PS and SOG of specific thicknesses are used to create optical interferences that modulate the signal coming from the interface of interest. The SOG substrate is comprised of a hydrogen silsesquioxane inorganic polymer film, which, when properly cured, has optical and chemical properties similar to glass. However, the untreated surface of a SOG thin film is terminated by silicon-hydrogen (Si-H) bonds, resulting in a low free energy, hydrophobic surface. Increasing exposures of this native SOG surface to UV activated oxygen species decreases the number of Si-H bonds in favor of silicon-hydroxyl (Si-OH) bonds, which form a high free energy, hydrophilic surface. Figure 11 shows the vibrationally resonant SFG spectra of the PS/SOG interface for a series of PS/SOG samples with varying exposure of the SOG substrate to activated oxygen (Oa). Analysis of the SFG spectrum for the native SOG substrate (i.e., 0 min Oa treatment), gives an absolute orientation of phenyl groups pointing away from the PS film (i.e., towards the SOG substrate) with an absolute molecular orientation similar to that observed previously for phenyl groups at the free PS surface. Changes in the SFG spectra for the Oa treated SOG substrates correlate with orientational changes in the tilt and twist angles of the pendant phenyl groups. The observed spectral changes suggest the phenyl groups alter their orientation to enable more favorable chemical interactions with surface Si-OH species.

    The changes in molecular orientation observed with SFG have been correlated with the adhesive strength of the polystyrene thin-film/glass interface. PS films peel off the untreated, low surface energy, hydrophobic SOG substrates; whereas PS films adhere to the higher surface energy, hydrophilic SOG substrates. This work paves the way for critically addressing the issues of molecular based adhesion between dissimilar materials in a variety of disciplines. (K. Briggman, J. Stephenson, with P. Wilson and L. Richter, Div. 837)

  • Scattering by Small Metallic Spheres. Small (50 nm to 200 nm) polystyrene latex (PSL) spheres are used by the semiconductor industry to calibrate the particle-sizing function of light-scattering-based scanning surface inspection instruments. However, these spheres are not typical of real-world particles encountered on production lines. The industry needs accurate models for scattering by real-world particles to design instruments and to provide the basis for particle size and particle identification using the instrument.

    In 1986, Bobbert and Vlieger described the solution to the scattering of light by a sphere on a flat substrate. However, it was found that for metallic particles on a highly reflecting silicon substrate, numerical instabilities caused their implementation to fail long before convergence was achieved. Painstaking efforts were made to find the roots of the instabilities, resulting in a final implementation of the theory, which is efficient, robust, and accurate. This solution was extended to account for uniform coatings on the substrate and the sphere.

    In collaboration with NIST's Building and Fire Research Laboratory and the University of Maryland, methods were developed in the Division to generate size-monodisperse copper spheres and to deposit them onto silicon wafers. Polarized light scattering measurements, performed at a wavelength close to the copper plasma frequency, were performed on these samples. The results yielded excellent agreement with the theoretical calculations (see fig. 12). The implementation of the theory, made publicly available through NIST's SCATMECH library of scattering codes, can act as a benchmark by which approximate codes, suitable for more complex particles, can be compared. (T. Germer)

  Figure 12

Figure 12. Light scattering parameters are plotted [differential scattering cross-section (DSC), the degree of polarization (P), the normalized degree of circular polarization (PC/P), and the principal angle of the polarization (η)] for 96 nm (circles), 113 nm (triangles), and 158 nm (squares) copper spheres on silicon wafers measured in the plane of incidence using 45° polarized, 633 nm light incident at an angle of 60°. The solid curves represent the predictions of the Bobbert-Vlieger theory.

  • Measuring the Dynamics of Individual RNA Molecules. We have measured the rotational dynamics of single RNA molecules tethered to a glass substrate. Recent single molecule experiments and many gene-chip technologies rely on the ability to tether a molecule to a surface without changing its activity. An assumption is often made that the molecules are unaffected by the presence of the surface. Here we explore this assumption on a single-molecule basis. A common scheme for tethering nucleic acids to surfaces exploits the high affinity bond of biotin with streptavidin (fig. 13). Here we label a single stranded RNA molecule on its 3' end with a dye called Cy3TM. At the 5' end, a single biotin molecule is attached to the RNA via a flexible tether. Streptavidin links the biotinylated RNA molecule to a coverslip coated with biotinylated bovine serum albumin (BSA). (L. Goldner, K. Weston, W. Heinz, and A. Bardo)
  Figure 13

Figure 13. Tethering RNA to a surface.

  • Infrared Imaging of Combinatorial Solar Cell Silicon-Hydride Films. Determining the chemical and nano-structural properties of modified silicon surfaces is of great importance to improve solar cell efficiency and use for future US and global solar energy conversion needs. To this end, Division researchers obtained the first infrared spectral images of a 16-element combinatorial array of 1 µm thick amorphous and polycrystalline deposited films on a silicon substrate. Using a 256 × 256 InSb infrared array detector coupled to a step-scan FTIR interferometer, infrared absorption images, as shown in fig. 14, identified Si-H film densities critical to solar cell applications. This investigation provided key structural information for samples obtained from the National Renewable Energy Lab by using OTD's unique infrared imaging capabilities.

    Chemical vapor deposition of silicon-hydride films in the presence of controlled hydrogen overpressures and substrate temperatures affects the amorphous and crystalline properties of the deposited film. These films also show enhanced hole mobilities with improved photon to carrier conversion efficiency and long-term stability compared to conventional amorphous silicon materials. Using NIST's infrared imaging capabilities on the 4 × 4 array demonstrated that this technology rapidly identifies Si-H film concentrations and provides correlations with independently measured film structure and conversion efficiencies. The technique also provides quick visual assessment of the uniformity of grown films. It is envisioned that future related studies of compositional or substrate temperature gradient deposited films could lead to the discovery of optimal growth conditions for improved solar cell devices. (T. Heimer and E. Heilweil)

  Figure 14

Figure 14. Infrared absorption at 2000 cm-1 for Si-H surface species in a 4×4 CVD film array (progression from dark gray to white denotes increasing Si-H density and infrared absorption).

  • Carrier Lifetimes of Low-Temperature GaAs Measured for Terahertz Antenna Applications. To better understand the broadest attainable frequency bandwidths of terahertz (THz) generators and detectors, Division researchers teamed with NIST's EEEL to measure carrier lifetimes in low-temperature GaAs films (LT-GaAs). Improving and controlling growth conditions for LT-GaAs films is critical for obtaining optimum performance in high-frequency THz devices. Charge mobility in antenna semiconductor substrates directly affects the output pulse duration and speed, thus producing varying terahertz frequency bandwidths in spectroscopic or imaging applications.

    Figure 15

    Figure 15. Transient reflectivity recovery dynamics for two samples of 1 µm thick MBE-grown LT-GaAs on GaAs substrates. The 365 fs carrier decay time is for EEEL material: while the slower 1.9 ps decay time is for a commercial sample.

      LT-GaAs films are known to yield several picosecond carrier lifetimes compared to GaAs or related semiconductors (100's of ps). High electron and hole mobilities correlate with shorter lifetimes - achieving short carrier lifetime films is preferred. Lifetimes for 1 µm thick chemical vapor deposited LT-GaAs films were measured using an amplified femtosecond Ti:Sapphire system with 50 femtosecond, 800 nm pulses. A reflection pump-probe apparatus directly monitored the time-dependent carrier reflectivity change after pump excitation. Figure 15 shows transient reflectivity results for films produced under ostensibly similar pressure and temperature growth conditions by a commercial vendor (decay time 1.9 ps) and in NIST's EEEL Division (365 fs decay). The carrier decay time fit (solid line) is approximately five times longer for the commercial film than for the EEEL material. We measure ~2 THz bandwidths for strip-line antenna systems using the commercial material and, from the lifetime decrease, bandwidths of up to ~12 THz may be achievable with the EEEL material. These measurements demonstrate the critical need to monitor temperature during deposition (achieved in the EEEL apparatus) and that measured lifetimes correlate with desired frequency response for THz antenna systems. (E. Heilweil and A. Migdall)

  • Colorimetric Characterization of Special-Effect Pigment Coatings. The Division, with ATP support, is developing methods for the quantitative characterization of special-effect pigment coatings, such as pearlescent coatings, important for the appearance of many commercial products, including automobiles, cosmetics, and various consumer goods. The complexity of these coatings increases the need for better appearance measurements for process and quality control.

    Pearlescent coatings typically consist of thin metal-oxide-coated transparent mica platelets (see fig. 16). Constructive and destructive interference of light from the front and back surface reflections of these platelets are responsible for the chroma, hue, and brightness variation with the angles of incidence and viewing.

    To quantify the properties of the pearlescent coatings, a series of samples supplied by manufacturers were examined using the Division's Spectral Tri-function Automated Reference Reflectometer (STARR). STARR measured the reflectance of the samples for incident wavelengths from 380 nm to 780 nm in 10 nm increments and incident angles of 15°, 25°, 45°, 65°, and 75°. Viewing angels were chosen from –80° to 80° in 5° steps. For each pair of incident and reflected angles, colorimetric values of lightness, a, b, hue, and chroma were determined. The STARR-determined colorimetric quantities validated the qualitative expectations by exhibiting a strong dependence on the incident and reflected angles. Empirically, it is found that measurements at a subset of the reflectance angles, 15°, 35°, 45°, 70°, and 85°, for each incident angle, provide a complete characterization of the coatings.

    Future efforts are directed at developing improved light scattering models to predict the optical properties of special-effect coatings, using recent experimental data on idealized coated samples for validation. (M. Nadal and T. Germer)

    Type of pigment Absorption Metallic Pearlescent
    Optical principle of pigments
    (first order)
    Schematic of absorption and/or difuse scattering
    Absorption and/or difuse scattering
    Schematic of specular reflection
    Specular reflection
    Schematic of thin-film interference
    Thin-film interference
    Perceived chroma and hue Independent of geometry Independent of geometry Dependent on geometry
    Perceived brightness Independent of geometry Dependent on geometry Dependent on geometry
    Measurement geometry 0°/45° or ~0°/d 45°/15°, 45° & 110° Under study

    Figure 16. Illustration of scattering mechanisms, perceptions, and measurement geometries for various types of common pigmented coatings.

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Online: March 2002