TECHNICAL ACTIVITIES 1998 - NISTIR 6268
MISSION
ORGANIZATION
CURRENT DIRECTIONS
TECHNICAL HIGHLIGHTS
FUTURE DIRECTIONS
MISSION
The Electron and Optical Physics Division's mission is to develop measurement
capabilities needed by emerging electronic and optical technologies,
particularly those required for submicron fabrication and analysis. In pursuit
of this mission, it maintains an array of research, measurement, and
calibration activities. In particular, the Division:
- provides the central national basis for absolute radiometry in the far
ultraviolet and extreme ultraviolet (EUV) regions of the electromagnetic
spectrum, which together span the photon energy range of 5 eV to
250 eV. This basis is maintained through a combination of ionization
chambers, calibrated transfer standard detectors, and an electron storage ring,
the SURF II Synchrotron Ultraviolet Radiation Facility, which provides a
dedicated source of radiation over this spectral range. SURF II also
supports a range of research activities by members of the Division, other NIST
organizational units, and external research groups;
- maintains specialized facilities for Scanning Electron Microscopy with
Polarization Analysis (SEMPA), and Scanning Tunneling Microscopy (STM). The
SEMPA facility provides unique capabilities for the study of surface magnetism
and has resulted in a wide range of collaborative research involving the
magnetic recording industry. The STM facility is used for studying surface
structure and dynamical phenomena and for developing the basic measurement
techniques necessary for atomic-level device fabrication;
- maintains an EUV optics characterization facility to perform measurements
of EUV optical components and systems, and to support applications of such
optics in microlithography, microscopy, and telescopy;
- performs theoretical and experimental research in atomic and condensed
matter physics in support of its basic mission objectives.
Mission | Organization | Current Directions | Technical Highlights | Future Directions
TECHNICAL ACTIVITIES 1998 -
Contents
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Online: April 1999