TECHNICAL ACTIVITIES 1998 - NISTIR 6268

Hemispherical Polarized Light Scattering Instrument. The scanning hemispherical polarized light scattering instrument analyzes the light scattered by defects and particles on silicon wafers. A laser beam is focused onto the sample, and 28 systems, each having a polarizer in front of a detector, collect the light scattered into different directions. In one configuration, the polarizers can be aligned so that the instrument is blind to scatter from microroughness, thereby improving the detection efficiency for smaller defects and particles.

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CURRENT DIRECTIONS
TECHNICAL HIGHLIGHTS
FUTURE DIRECTIONS

TECHNICAL ACTIVITIES 1998 - Contents

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Online: April 1999