(70.-220. eV: SiH4, SiF4, PH3, H2S, HCl)
Experimental X-Ray Mass Attenuation Coefficients for Materials of Low Atomic Number in the Energy Range 4 to 25 keV
Millar, R. H. and Greening, J. R.,
J. Phys. B
7, 2332-2344 (1974)
(4.508-25.192 keV: N, O, Ne, Mg, Al, Ar, C2H4, CO2, CF4, H2S, HCl, Air, SiO2, (C2H5)3·PO4)