This software system was developed at the National Institute of Standards and
Technology by employees of the Federal Government in the course of their official duties,
pursuant to title 17 Section 105 of the United States Code. Data and descriptions of this software
system are not subject to copyright protection and are in the public domain. This software system is
an experimental system. NIST assumes no responsibility whatsoever for its use by other parties,
and makes no guarantees, expressed or implied, about its quality, reliability, or any other characteristic.
We would appreciate acknowledgement if the software is used.
Technical Inquiries: Thomas Brian Renegar
Surface and Nanostructure Metrology Group
Semiconductor and Dimensional Metrology Division
Physical Measurement Laboratory
NIST, 100 Bureau Drive, Stop 8212
Gaithersburg, MD 20899-8212
NIST | PML | Semiconductor and Dimensional Metrology Division
NIST Program Questions: Public Inquiries Unit,