Trifluorosilyl radical (SiF3)
Table of Cross Sections for SiF3
| Energy (eV) | BEB (Å2) |
|---|
| 9.30 | 0.000 |
| 9.50 | 0.021 |
| 10.00 | 0.076 |
| 10.50 | 0.132 |
| 11.00 | 0.188 |
| 11.50 | 0.244 |
| 12.00 | 0.297 |
| 12.50 | 0.349 |
| 13.00 | 0.399 |
| 13.50 | 0.447 |
| 14.00 | 0.493 |
| 14.50 | 0.536 |
| 15.00 | 0.577 |
| 15.50 | 0.616 |
| 16.00 | 0.653 |
| 16.50 | 0.689 |
| 17.00 | 0.722 |
| 17.50 | 0.753 |
| 18.00 | 0.785 |
| 18.50 | 0.829 |
| 19.00 | 0.881 |
| 19.50 | 0.946 |
| 20.00 | 1.016 |
| 20.50 | 1.090 |
| 21.00 | 1.174 |
| 21.50 | 1.259 |
| 22.00 | 1.343 |
| 22.50 | 1.425 |
| 23.00 | 1.511 |
| 23.50 | 1.597 |
| 24.00 | 1.681 |
| 26.00 | 2.004 |
| 28.00 | 2.302 |
| 30.00 | 2.574 |
| 32.00 | 2.820 |
| 34.00 | 3.044 |
| 36.00 | 3.246 |
| 38.00 | 3.428 |
| 40.00 | 3.593 |
| 45.00 | 3.947 |
| 50.00 | 4.272 |
| 55.00 | 4.537 |
| 60.00 | 4.752 |
| 65.00 | 4.926 |
| 70.00 | 5.065 |
| 75.00 | 5.177 |
| 80.00 | 5.265 |
| 85.00 | 5.333 |
| 90.00 | 5.385 |
| 95.00 | 5.423 |
| 100.00 | 5.450 |
| 105.00 | 5.467 |
| 110.00 | 5.476 |
| 115.00 | 5.477 |
| 120.00 | 5.473 |
| 125.00 | 5.466 |
| 130.00 | 5.455 |
| 135.00 | 5.440 |
| 140.00 | 5.422 |
| 145.00 | 5.401 |
| 150.00 | 5.378 |
| 160.00 | 5.327 |
| 170.00 | 5.269 |
| 180.00 | 5.209 |
| 190.00 | 5.145 |
| 200.00 | 5.080 |
| 210.00 | 5.014 |
| 220.00 | 4.947 |
| 230.00 | 4.880 |
| 240.00 | 4.814 |
| 250.00 | 4.748 |
| 300.00 | 4.434 |
| 350.00 | 4.149 |
| 400.00 | 3.895 |
| 450.00 | 3.669 |
| 500.00 | 3.467 |
| 550.00 | 3.287 |
| 600.00 | 3.125 |
| 650.00 | 2.979 |
| 700.00 | 2.847 |
| 750.00 | 2.726 |
| 800.00 | 2.616 |
| 850.00 | 2.515 |
| 900.00 | 2.422 |
| 950.00 | 2.336 |
| 1000.00 | 2.256 |
| 1100.00 | 2.113 |
| 1200.00 | 1.988 |
| 1300.00 | 1.878 |
| 1400.00 | 1.780 |
| 1500.00 | 1.692 |
| 1600.00 | 1.614 |
| 1700.00 | 1.542 |
| 1800.00 | 1.478 |
| 1900.00 | 1.418 |
| 2000.00 | 1.364 |
| 2100.00 | 1.314 |
| 2200.00 | 1.268 |
| 2300.00 | 1.225 |
| 2400.00 | 1.185 |
| 2500.00 | 1.147 |
| 2600.00 | 1.113 |
| 2700.00 | 1.080 |
| 2800.00 | 1.049 |
| 2900.00 | 1.020 |
| 3000.00 | 0.993 |
| 4000.00 | 0.787 |
| 5000.00 | 0.655 |