Silicon tetrafluoride (SiF4)
Table of Cross Sections for SiF4
| Energy (eV) | BEB (Å2) |
|---|
| 16.31 | 0.000 |
| 16.50 | 0.012 |
| 17.00 | 0.043 |
| 17.50 | 0.087 |
| 18.00 | 0.149 |
| 18.50 | 0.224 |
| 19.00 | 0.305 |
| 19.50 | 0.387 |
| 20.00 | 0.481 |
| 20.50 | 0.585 |
| 21.00 | 0.690 |
| 21.50 | 0.794 |
| 22.00 | 0.898 |
| 22.50 | 1.006 |
| 23.00 | 1.114 |
| 23.50 | 1.220 |
| 24.00 | 1.325 |
| 26.00 | 1.729 |
| 28.00 | 2.105 |
| 30.00 | 2.452 |
| 32.00 | 2.770 |
| 34.00 | 3.061 |
| 36.00 | 3.327 |
| 38.00 | 3.569 |
| 40.00 | 3.791 |
| 45.00 | 4.267 |
| 50.00 | 4.713 |
| 55.00 | 5.087 |
| 60.00 | 5.398 |
| 65.00 | 5.656 |
| 70.00 | 5.869 |
| 75.00 | 6.044 |
| 80.00 | 6.187 |
| 85.00 | 6.303 |
| 90.00 | 6.397 |
| 95.00 | 6.472 |
| 100.00 | 6.530 |
| 105.00 | 6.574 |
| 110.00 | 6.606 |
| 115.00 | 6.627 |
| 120.00 | 6.640 |
| 125.00 | 6.647 |
| 130.00 | 6.648 |
| 135.00 | 6.643 |
| 140.00 | 6.634 |
| 145.00 | 6.620 |
| 150.00 | 6.602 |
| 160.00 | 6.558 |
| 170.00 | 6.504 |
| 180.00 | 6.443 |
| 190.00 | 6.377 |
| 200.00 | 6.307 |
| 210.00 | 6.235 |
| 220.00 | 6.160 |
| 230.00 | 6.085 |
| 240.00 | 6.009 |
| 250.00 | 5.933 |
| 300.00 | 5.563 |
| 350.00 | 5.220 |
| 400.00 | 4.910 |
| 450.00 | 4.632 |
| 500.00 | 4.382 |
| 550.00 | 4.158 |
| 600.00 | 3.956 |
| 650.00 | 3.774 |
| 700.00 | 3.608 |
| 750.00 | 3.456 |
| 800.00 | 3.318 |
| 850.00 | 3.191 |
| 900.00 | 3.073 |
| 950.00 | 2.965 |
| 1000.00 | 2.865 |
| 1100.00 | 2.684 |
| 1200.00 | 2.526 |
| 1300.00 | 2.387 |
| 1400.00 | 2.263 |
| 1500.00 | 2.152 |
| 1600.00 | 2.052 |
| 1700.00 | 1.962 |
| 1800.00 | 1.880 |
| 1900.00 | 1.805 |
| 2000.00 | 1.736 |
| 2100.00 | 1.672 |
| 2200.00 | 1.614 |
| 2300.00 | 1.559 |
| 2400.00 | 1.508 |
| 2500.00 | 1.461 |
| 2600.00 | 1.417 |
| 2700.00 | 1.376 |
| 2800.00 | 1.337 |
| 2900.00 | 1.300 |
| 3000.00 | 1.265 |
| 4000.00 | 1.004 |
| 5000.00 | 0.836 |