Silane (SiH4)
Table of Cross Sections for SiH4
| Energy (eV) | BEB (Å2) |
|---|
| 11.65 | 0.000 |
| 12.00 | 0.112 |
| 12.50 | 0.276 |
| 13.00 | 0.444 |
| 13.50 | 0.613 |
| 14.00 | 0.780 |
| 14.50 | 0.945 |
| 15.00 | 1.106 |
| 15.50 | 1.263 |
| 16.00 | 1.415 |
| 16.50 | 1.562 |
| 17.00 | 1.704 |
| 17.50 | 1.841 |
| 18.00 | 1.972 |
| 18.50 | 2.099 |
| 19.00 | 2.220 |
| 19.50 | 2.336 |
| 20.00 | 2.449 |
| 20.50 | 2.568 |
| 21.00 | 2.683 |
| 21.50 | 2.794 |
| 22.00 | 2.900 |
| 22.50 | 3.003 |
| 23.00 | 3.101 |
| 23.50 | 3.196 |
| 24.00 | 3.287 |
| 26.00 | 3.617 |
| 28.00 | 3.898 |
| 30.00 | 4.136 |
| 32.00 | 4.338 |
| 34.00 | 4.509 |
| 36.00 | 4.653 |
| 38.00 | 4.775 |
| 40.00 | 4.876 |
| 45.00 | 5.061 |
| 50.00 | 5.171 |
| 55.00 | 5.229 |
| 60.00 | 5.248 |
| 65.00 | 5.241 |
| 70.00 | 5.214 |
| 75.00 | 5.174 |
| 80.00 | 5.122 |
| 85.00 | 5.064 |
| 90.00 | 5.001 |
| 95.00 | 4.934 |
| 100.00 | 4.865 |
| 105.00 | 4.795 |
| 110.00 | 4.725 |
| 115.00 | 4.655 |
| 120.00 | 4.586 |
| 125.00 | 4.518 |
| 130.00 | 4.451 |
| 135.00 | 4.385 |
| 140.00 | 4.321 |
| 145.00 | 4.258 |
| 150.00 | 4.196 |
| 160.00 | 4.077 |
| 170.00 | 3.963 |
| 180.00 | 3.855 |
| 190.00 | 3.753 |
| 200.00 | 3.655 |
| 210.00 | 3.563 |
| 220.00 | 3.475 |
| 230.00 | 3.391 |
| 240.00 | 3.311 |
| 250.00 | 3.235 |
| 300.00 | 2.904 |
| 350.00 | 2.638 |
| 400.00 | 2.418 |
| 450.00 | 2.235 |
| 500.00 | 2.079 |
| 550.00 | 1.945 |
| 600.00 | 1.829 |
| 650.00 | 1.727 |
| 700.00 | 1.636 |
| 750.00 | 1.555 |
| 800.00 | 1.482 |
| 850.00 | 1.416 |
| 900.00 | 1.357 |
| 950.00 | 1.302 |
| 1000.00 | 1.252 |
| 1100.00 | 1.164 |
| 1200.00 | 1.088 |
| 1300.00 | 1.021 |
| 1400.00 | 0.963 |
| 1500.00 | 0.912 |
| 1600.00 | 0.866 |
| 1700.00 | 0.825 |
| 1800.00 | 0.788 |
| 1900.00 | 0.754 |
| 2000.00 | 0.724 |
| 2100.00 | 0.695 |
| 2200.00 | 0.670 |
| 2300.00 | 0.646 |
| 2400.00 | 0.623 |
| 2500.00 | 0.603 |
| 2600.00 | 0.584 |
| 2700.00 | 0.566 |
| 2800.00 | 0.549 |
| 2900.00 | 0.533 |
| 3000.00 | 0.518 |
| 4000.00 | 0.407 |
| 5000.00 | 0.337 |