Tetramethylsilane (TMS)

Table of Cross Sections for TMS
Energy (eV) BEB (Å2)
9.80 0.000
10.00 0.076
10.50 0.273
11.00 0.477
11.50 0.683
12.00 0.887
12.50 1.088
13.00 1.284
13.50 1.475
14.00 1.659
14.50 1.858
15.00 2.125
15.50 2.448
16.00 2.830
16.50 3.208
17.00 3.581
17.50 3.962
18.00 4.337
18.50 4.703
19.00 5.059
19.50 5.406
20.00 5.742
20.50 6.068
21.00 6.384
21.50 6.690
22.00 6.985
22.50 7.270
23.00 7.546
23.50 7.812
24.00 8.068
26.00 9.040
28.00 9.944
30.00 10.741
32.00 11.438
34.00 12.045
36.00 12.574
38.00 13.033
40.00 13.432
45.00 14.208
50.00 14.738
55.00 15.088
60.00 15.304
65.00 15.420
70.00 15.461
75.00 15.445
80.00 15.386
85.00 15.295
90.00 15.178
95.00 15.043
100.00 14.894
105.00 14.735
110.00 14.569
115.00 14.398
120.00 14.225
125.00 14.050
130.00 13.875
135.00 13.700
140.00 13.526
145.00 13.354
150.00 13.183
160.00 12.849
170.00 12.527
180.00 12.216
190.00 11.917
200.00 11.631
210.00 11.356
220.00 11.093
230.00 10.841
240.00 10.600
250.00 10.369
300.00 9.350
350.00 8.518
400.00 7.828
450.00 7.246
500.00 6.750
550.00 6.321
600.00 5.946
650.00 5.617
700.00 5.324
750.00 5.062
800.00 4.826
850.00 4.613
900.00 4.419
950.00 4.242
1000.00 4.080
1100.00 3.792
1200.00 3.544
1300.00 3.329
1400.00 3.140
1500.00 2.973
1600.00 2.823
1700.00 2.689
1800.00 2.568
1900.00 2.458
2000.00 2.358
2100.00 2.266
2200.00 2.181
2300.00 2.103
2400.00 2.031
2500.00 1.964
2600.00 1.901
2700.00 1.842
2800.00 1.788
2900.00 1.736
3000.00 1.688
4000.00 1.325
5000.00 1.096