Trifluorosilyl radical (SiF3) Energy (eV) BEB (A^2) 9.30 0.000 9.50 0.021 10.00 0.076 10.50 0.132 11.00 0.188 11.50 0.244 12.00 0.297 12.50 0.349 13.00 0.399 13.50 0.447 14.00 0.493 14.50 0.536 15.00 0.577 15.50 0.616 16.00 0.653 16.50 0.689 17.00 0.722 17.50 0.753 18.00 0.785 18.50 0.829 19.00 0.881 19.50 0.946 20.00 1.016 20.50 1.090 21.00 1.174 21.50 1.259 22.00 1.343 22.50 1.425 23.00 1.511 23.50 1.597 24.00 1.681 26.00 2.004 28.00 2.302 30.00 2.574 32.00 2.820 34.00 3.044 36.00 3.246 38.00 3.428 40.00 3.593 45.00 3.947 50.00 4.272 55.00 4.537 60.00 4.752 65.00 4.926 70.00 5.065 75.00 5.177 80.00 5.265 85.00 5.333 90.00 5.385 95.00 5.423 100.00 5.450 105.00 5.467 110.00 5.476 115.00 5.477 120.00 5.473 125.00 5.466 130.00 5.455 135.00 5.440 140.00 5.422 145.00 5.401 150.00 5.378 160.00 5.327 170.00 5.269 180.00 5.209 190.00 5.145 200.00 5.080 210.00 5.014 220.00 4.947 230.00 4.880 240.00 4.814 250.00 4.748 300.00 4.434 350.00 4.149 400.00 3.895 450.00 3.669 500.00 3.467 550.00 3.287 600.00 3.125 650.00 2.979 700.00 2.847 750.00 2.726 800.00 2.616 850.00 2.515 900.00 2.422 950.00 2.336 1000.00 2.256 1100.00 2.113 1200.00 1.988 1300.00 1.878 1400.00 1.780 1500.00 1.692 1600.00 1.614 1700.00 1.542 1800.00 1.478 1900.00 1.418 2000.00 1.364 2100.00 1.314 2200.00 1.268 2300.00 1.225 2400.00 1.185 2500.00 1.147 2600.00 1.113 2700.00 1.080 2800.00 1.049 2900.00 1.020 3000.00 0.993 4000.00 0.787 5000.00 0.655