Here is the electron-impact ionization cross section for Trifluorosilyl radical (SiF3) from 5 eV to 1000 eV.

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T=5 to 1000 eV T=5 to 100 eV T=50 to 250 eV T=250 to 1000 eV

Legend (below)

Data setSource
W. Hwang, Y.-K. Kim and M.E. Rudd, J. Chem. Phys. 104, 2956 (1996).
Experiment #1T. R. Hayes, R. J. Shul, F. A. Baiocchi, R. C. Wetzel and R. S. Freund, J. Chem. Phys. 89, 4035 (1988).

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