Publications
Internet-based Surface Metrology Algorithm Testing System
Documents
S. H. Bui, T. V. Vorburger, B. Muralikrishnan, J. Raja,
Surface Metrology Software Variability in Two-Dimensional Measurement,
Proc. ASPE 2003.
S. H. Bui, T. Brian Renegar, T. V. Vorburger, J. Raja, M. C.
Malburg, Internet-based Surface Metrology Algorithm Testing System,
9th Int. Conf on Metrology and Properties Engineering
Surfaces, 2003
S. H. Bui, T. Brian Renegar, T. V. Vorburger, Virtual Surface
Calibration Database, to
appear in XI. International Colloquium on Surfaces, 2004
Internet-based Surface Metrology Algorithm Testing System related Standards
References
ISO 5436-2, Geometrical Product Specifications (GPS) — Surface texture: Profile
method; Measurement standards. Part 2: Software measurement standards, International Organization for Standardization, Geneva, 2001
ISO 4287, Geometrical Product Specifications (GPS) -- Surface texture: Profile
method -- Terms, definitions and surface texture parameters, International Organization for Standardization, Geneva, 1997
ISO 4288 , Geometrical Product Specifications (GPS) -- Surface texture: Profile
method -- Rules and procedures for the assessment of surface texture, International Organization for Standardization, Geneva, 1996
ISO 11562, Geometrical Product Specifications (GPS) -- Surface texture: Profile
method -- Metrological characteristics of phase correct filters, International Organization for Standardization, Geneva, 1996
ISO 3274, Geometrical Product Specifications (GPS) -- Surface texture:
Profile method -- Nominal characteristics of contact (stylus) instruments, International Organization for Standardization, Geneva, 1996
Surface Texture (Surface Roughness, Waviness, and Lay), an American National
Standard, ASME B46.1-2002, New York, NY
Others
L. Young, R. Krueger-Sehm, B. Spranger, L. Koenders, Reference software
for roughness analysis, Proceedings of the EUSPEN 2001, Turin, Italy, p.
500 – 503
F. Sacerdotti, A. Porrino, C. Butler, S. Brinkmann, M. Vermeulen, SCOUT –
Surface characterization open-source universal toolbox, Meas. Sci. Technol,
13, 2002, N21-N26
S. H. Bui, V. Gopalan, J. Raja, An Internet-based Surface Texture Information
System, International Journal of Machine Tools & Manufacture,
41, Issue 13-14, 2001, p. 2171-2177
S. H. Bui, S. Fu, V. Gopalan, B. Muralikrishnan and J.Raja, An internet
based surface & form analysis software system, Measurement: Journal
of the International Measurement Confederation (IMEKO), 2003
K. J. Stout, P. J. Sullivan, W. P. Dong, E. Mainsah, N. Lou, T. Mathia and
H. Zahouani, The Development of Methods for The Characterisation of Roughness
in Three Dimensions, Report EUR 15178 EN. EC Brussels, 1993
B. Muralikrishnan, J. Raja, A proposal for a common language for sharing
surface texture data, Proc. ASPE 2002, p. 434-437
Y. B. Yuan, T. V. Vorburger, J. F. Song, and T. B. Renegar, A Simplified Realization for the Gaussian Filter in Surface Metrology, X. International Colloquium on Surfaces, Chemnitz, Germany, 2000
C. Temperton, Self-sorting mixed-radix fast fourier transforms, Journal of
Computational Physics, 52(1):1-23, 1983
X. Liu, advanced techniques for separation of roughness, waviness and form,
Ph.D. Dissertation, University of North Carolina at Charlotte, Charlotte,
North Carolina, 1999
R. K Leach and P. M. Harris, Ambiguities in the definition of spacing parameters
for surface-texture characterization, Measurement Science and Technology,
13, 2002, p. 1924-1930
E. Marx, I. Malik, Y. E. Strausser, T. Bristow, M. Poduje, J. Stover,
Power Spectral Densities: A Multiple Technique Study of Different Si Wafer
Surfaces, J. Vac. Sci. Technol, 20, 31-41, 2002
T. V. Vorburger, J. Raja, Surface Finish Metrology Tutorial, NISTIR
89-4088 (National Institute of Standards and Technology, Gaithersburg,
MD, 1990)
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