Precision Engineering Division Internet-based Surface Metrology Algorithm Testing System
 Internet-based Surface Metrology Algorithm Testing SystemNational Institute of Standards and Technology

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 bullet Using the System

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Analysis Tools & Database

 bullet 2D Analysis Tools

 bullet 2D Virtual SRM Database

 bullet 3D Analysis Tools

 bullet 3D Virtual SRM Database









Using the System

With an Internet connection and a web browser, you can access the Internet-based Surface Metrology Algorithm Testing System. After login to the system, you can perform surface finish analysis and download reference data with calculated surface parameters from the database. On the main page of the homepage, you can view four options: Reference Software for 2D Surface Analysis, 2D Virtual SRM Database, Reference Software for 3D Surface Analysis, and 3D Virtual SRM Database. By clicking on Reference Software for 2D Surface Analysis or 2D Virtual SRM Database, you can access the 2D database and use 2D analysis tools. On the other hand, you can access 3D analysis tools and 3D Virtual SRM Database by clicking on Reference Software for 3D Surface Analysis and 3D Virtual SRM Database. After you choose one of these options, you can view more help screens on the Help menu at the upper right corner of the screen.




















This software system was developed at the National Institute of Standards and Technology by employees of the Federal Government in the course of their official duties, pursuant to title 17 Section 105 of the United States Code. Data and descriptions of this software system are not subject to copyright protection and are in the public domain. This software system is an experimental system. NIST assumes no responsibility whatsoever for its use by other parties, and makes no guarantees, expressed or implied, about its quality, reliability, or any other characteristic. We would appreciate acknowledgement if the software is used.


Technical Inquiries: Thomas Brian Renegar
Surface and Nanostructure Metrology Group
Semiconductor and Dimensional Metrology Division
Physical Measurement Laboratory
NIST, 100 Bureau Drive, Stop 8212
Gaithersburg, MD 20899-8212

NIST | PML | Semiconductor and Dimensional Metrology Division

NIST Program Questions: Public Inquiries Unit,
(301) 975-NIST, TTY (301) 975-8295.
NIST, 100 Bureau Drive, Stop 3460, Gaithersburg, MD 20899-3460
Technical Web Site Questions: Thomas Brian Renegar
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NIST is an agency of the: U.S. Department of Commerce

Date Created: July 15, 2002
Last Updated: October 22, 2012